Environmental Solutions for the Solar Industry
Silicon, used to make some of the earliest photovoltaic (PV) devices, is still the most popular material for solar cells. Outranked only by oxygen, silicon is also the second-most abundant element in the Earth's crust. However, to be useful as a semiconductor material in solar cells, silicon must be refined to a purity of 99.9999%. Verantis has become a leader in providing solutions for these complex refining processes.
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TCS Process Vent Scrubbing (86KB PDF)
TCS Production Emergency Vent Scrubbing (303KB PDF)
HCL Scrubber for Silica Processing (534KB PDF)
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The composition of exhaust gases from TCS production can include various chlorosilanes, silicon tetrachloride, and hydrogen gas. Understanding the hydrolysis and interaction of these chemicals along with associated heat generation, reaction byproducts, and proper pH control is critical to maintaining continuous operation of the pollution abatement equipment.
Verantis? broad range of scrubber designs, along with our extensive chemical engineering experience, enables us to select the right equipment combination to insure maximum system availability when dealing with complex silicon chemistry. Our eductor venturis (EVS Series) provide high liquid to gas ratios and can be designed in multiple stages to achieve high-efficiency removal and minimize potential fouling. If additional removal is required, our packed tower scrubbers can be used for final exhaust polishing.
Complete system design, including upstream knock-out drums to deal with process liquid surges and downstream seal pots to prevent atmospheric air backflow, can be provided.
Environmental Solutions for the Solar Industry (362KB PDF)
IWS™/IPS Scrubber Systems (823KB PDF)
Visit our Product Literature page.
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Emergency vent systems pose a bigger challenge than normal process venting systems. The systems must be designed to react quickly to a large release of toxic and/or pollutant gases. A high degree of system readiness, along with the ability to achieve high removal efficiency, is a must. Verantis emergency scrubbing systems have been utilized across a broad range of applications in the solar, chemical process and water treatment industries. Our systems are designed to achieve high-efficiency removal while dealing with heat generation and soluble or insoluble byproducts. Depending on the application, combinations of Verantis spray towers (ST Series), eductor venturis (EVS Series), and/or packed towers (SPT Series) can be designed to meet any performance efficiency or required outlet loading.
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Waste destruction of chlorinated silanes presents the unique challenge of treating incineration gases containing both hydrochloric acid gas and ultra-fine particles of SiO2. The Verantis IWS® (Ionizing Wet Scrubber) system was designed with this specific problem in mind and has been proven to achieve strict compliance standards across a broad range of applications. Typical examples include thermal destruction of silica compounds in the chemical process industry and silicon ingot production in the fiber optics industry. The IWS system is a patented design combining electrostatic charging with a packed scrubber which provides removal of submicron particulate with simultaneous acid gas removal. The crossflow design of the wetted ionizer and packed section minimizes fouling and provides maximum system availability. The IWS units can also be operated in series providing retrofit flexibility for changes in system capacity or to meet future regulatory requirements.
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The solution for NOx emission control is more complex than standard scrubbing methodology. Achieving the required removal efficiency requires an understanding of the various components of NOx, their interaction, and their effect on visible emissions. Verantis has conducted extensive pilot tests on this application and has installed NOx removal systems on a variety of wet-chemistry applications. We can select the right combination of equipment and chemistry to meet the required process design and guarantee a ?clear stack.?
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During the cleaning process, various alkalis and acids such as ammonia (NH3), hydrofluoric acid (HF), and hydrochloric acid (HCl) produce emissions that must be removed prior to atmospheric venting. Verantis can provide high-efficiency packed scrubbers in either countercurrent (SPT Series) or crossflow (HRP series) modes to meet this requirement. Verantis packed scrubber systems utilize our proprietary Tellerette® Tower Packing and our low-vibration CLUB series fans have become the accepted standard for clean room exhaust systems throughout the solar and semiconductor industries.
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SiO2 Particulate Control ? Slicing/Lapping/Grinding
Whether the particulate is fine or coarse, Verantis has a broad range of products for controlling emissions. Our complete line of venturi scrubbers includes both fixed throat (VSV series) and variable throat (VTV Series) designs that can process a wide range of exhaust capacities from very small to vary large. We have experience providing SiO2 removal systems as small as 150 CFM with particulate loadings in excess of 100 gr/SCF.
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